equipment and spare parts

bulletSST 421-280
Spray Solvent Tool
Wafer Size: 200mm
Number of Tanks: 4
Number of heated Tanks: 2
Class 1
Touch Screen Monitor
Pneumatic Pumps Trebor 610
bulletFor further Details:
Download PDF-Document
request SST 421-280 information


bulletSRD and SST 
Stainless Steel Rotos 
all Sizes New & Repair
Made to Customer Specification


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Turbine Flowmeter installed in Semitool SST available new and repair Original Semitool Part Number
bulletp/n 72056-07
bulletp/n 72056-30
bulletp/n 72056-31
bulletp/n 72056-27T


 Flow-Meter information

bulletBowls for Spin Rinse Dryer -SRD- and Spray Solvent Tools -SST-
New available & Repair capability


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bulletAssorted Spare Parts

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see actuators

see Trebor pumps  

bulletA variety of spare parts for Semitool Equipment is available

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various spare parts

bulletRefurbished Spin Rinse Dryer
see refurbishment pages
please click

SRD 260 S

SRD 270 S

SRD 870 S

SRD 880S

SRD 2300S

SRD 4300S

SRD 8300S


please see next page for
 service details


service details

bulletUsed SRD & SST Rotors
A182-50MB (Balance 0...25)

see Rotor details